We investigate the output performance of a cubic harvester which can scavenge low-frequency vibration energy from all directions. By adjusting the size and shape of the inside magnets, higher induced voltages and output power can be achieved. The optimal magnet is found to be cubic shape with the length of 6.35 mm (25.6% volume ratio), which can generate 4.27 mV root mean square voltage and 2.45 μW average power at the frequency of 28.86 Hz and acceleration of 1.17 g. The device is also demonstrated as a self-powered tilt sensor by measuring induced voltages at different tilt angles.
REFERENCES
1.
S.
Roundy
, P. K.
Wright
, and J.
Rabaey
, Comput. Commun.
26
, 1131
(2003
).2.
P.
Glynne-Jones
, M. J.
Tudor
, S. P.
Beeby
, and N. M.
White
, Sens. Actuators, A
110
, 344
(2004
).3.
M.
Han
, Q.
Yuan
, X.
Sun
, and H.
Zhang
, J. Microelectromech. Syst.
23
, 204
(2014
).4.
R.
Elfrink
, T. M.
Kamel
, M.
, Goedbloed
, S.
Matova
, D.
Hohlfeld
, Y.
Van Andel
, and R.
Van Schaijk
, J. Micromech. Microeng.
19
, 094005
(2009
).5.
Y.
Suzuki
, D.
Miki
, M.
Edamoto
, and M.
Honzumi
, J. Micromech. Microeng.
20
, 104002
(2010
).6.
M.
Han
, X. S.
Zhang
, W.
Liu
, X.
Sun
, X.
Peng
, and H.
Zhang
, Sci. China: Technol. Sci.
56
, 1835
(2013
).7.
B.
Yang
, W. L.
Kee
, S. P.
Lim
, and C.
Lee
, J. Micro/Nanolithogr. MEMS, MOEMS
9
, 023002
(2010
).8.
I.
Sari
, T.
Balkan
, and H.
Kulah
, J. Microelectromech. Syst.
19
, 14
(2010
).9.
A. F.
Arrieta
, P.
Hagedorn
, A.
Erturk
, and D. J.
Inman
, Appl. Phys. Lett.
97
, 104102
(2010
).10.
H.
Liu
, K. H.
Koh
, and C.
Lee
, Appl. Phys. Lett.
104
, 053901
(2014
).11.
M.
Han
, W.
Liu
, B.
Meng
, X. S.
Zhang
, X.
Sun
, and H.
Zhang
, in Proceedings of the IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), San Fransisco, USA, 26–30 January 2014
(IEEE
, 2014
), pp. 425
–428
.12.
R. E.
Taylor
, C. M.
Boyce
, M. C.
Boyce
, and B. L.
Pruitt
, J. Micromech. Microeng.
23
, 105004
(2013
).13.
N.
Boules
, IEEE T. Ind. Appl.
IA-21
, 633
(1985
).14.
R.
Olaru
and D. D.
Dragoi
, Sens. Actuators, A
120
, 424
(2005
).15.
M.
Han
, X. S.
Zhang
, X.
Sun
, B.
Meng
, W.
Liu
, and H.
Zhang
, Sci. Rep.
4
, 4811
(2014
).© 2014 AIP Publishing LLC.
2014
AIP Publishing LLC
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