This work describes an automated opto-fluidic system for parallel non-contact manipulation of microcomponents. The strong dynamics of laser-driven thermocapillary flows were used to drag microcomponents at high speeds. High-speed flows allowed to manipulate micro-objects in a parallel manner only using a single laser and a mirror scanner. An automated process was implemented using visual servoing with a high-speed camera in order to achieve accurately parallel manipulation. Automated manipulation of two glass beads of 30 up to 300 μm in diameter moving in parallel at speeds in the range of mm/s was demonstrated.

1.
N.
Bowden
,
F.
Arias
,
T.
Deng
, and
G. M.
Whitesides
,
Langmuir
17
,
1757
(
2001
).
2.
H.
Onoe
,
K.
Matsumoto
, and
I.
Shimoyama
,
Small
3
,
1383
(
2007
).
3.
J.-H.
Cho
,
A.
Azam
, and
D. H.
Gracias
,
Langmuir
26
,
16534
(
2010
).
4.
F.
Arai
,
K.
Onda
,
R.
Iitsuka
, and
H.
Maruyama
, in
Proceedings of IEEE International Conference on Robotics and Automation (ICRA)
(
IEEE
,
2009
), p.
1832
.
5.
P.
Rodrigo
,
R.
Eriksen
,
V.
Daria
, and
J.
Glueckstad
,
Opt. Exp.
10
,
1550
(
2002
).
6.
L.
Zhang
,
J. J.
Abbott
,
L.
Dong
,
B. E.
Kratochvil
,
D.
Bell
, and
B. J.
Nelson
,
Appl. Phys. Lett.
94
,
064107
(
2009
).
7.
P. Y.
Chiou
,
A. T.
Ohta
, and
M. C.
Wu
,
Nature (London)
436
,
370
(
2005
).
8.
S.
Oberti
,
D.
Möller
,
A.
Neild
,
J.
Dual
,
F.
Beyeler
,
B.
Nelson
, and
S.
Gutmann
,
Ultrasonics
50
,
247
(
2010
).
9.
D.
Baigl
, “
Photo-actuation of liquids for light-driven microfluidics: State of the art and perspectives
,”
Lab Chip
12
,
3637
(
2012
).
10.
M. L.
Cordero
,
D. R.
Burnham
,
C. N.
Baroud
, and
D.
McGloin
,
Appl. Phys. Lett.
93
,
034107
(
2008
).
11.
A. S.
Basu
and
Y. B.
Gianchandani
,
J. Microelectromech. Syst.
18
,
1163
(
2009
).
12.
E.
Vela
,
C.
Pacoret
,
S.
Bouchigny
,
S.
Régnier
,
K.
Rink
, and
A.
Bergander
, in
Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)
(
IEEE
,
2008
), p.
913
.
13.
M.
Hagiwara
,
T.
Kawahara
, and
F.
Arai
,
Appl. Phys. Lett.
101
,
074102
(
2012
).
14.
E.
Vela
,
M.
Hafez
, and
S.
Régnier
,
Int. J. Optomechatronics
3
,
289
(
2009
).
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