Fabrication of titanium tips via electrochemical etching is commonly hindered by the formation of a tough oxide layer. A new one-step approach based on dc etching in a non-aqueous electrolyte is presented. The electrochemical tip etching was carried out at 20 V in a benign etchant of 1M NaCl in ethylene glycol. Tip radii below 100 nm are demonstrated using current cut-off control and approaching 150 nm without cut-off control. The simplicity and efficiency of the approach eliminates pre and post electropolishing steps due to the electropolishing capability of a NaCl-ethylene glycol based electrolyte.
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See supplementary material at http://dx.doi.org/10.1063/1.4865759 for tip quality metrics and etching statistics as well as EDX data.
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