For multilayered materials, reflectivity depends on the complex dielectric function of all the constituent layers, and a detailed analysis is required to separate them. Furthermore, for some cases, new quantum states can occur at the interface which may change the optical properties of the material. In this paper, we discuss various aspects of such analysis, and present a self-consistent iteration procedure, a versatile method to extract and separate the complex dielectric function of each individual layer of a multilayered system. As a case study, we apply this method to LaAlO3/SrTiO3 heterostructure in which we are able to separate the effects of the interface from the LaAlO3 film and the SrTiO3 substrate. Our method can be applied to other complex multilayered systems with various numbers of layers.
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December 2014
Research Article|
December 30 2014
Self-consistent iteration procedure in analyzing reflectivity and spectroscopic ellipsometry data of multilayered materials and their interfaces
T. C. Asmara;
T. C. Asmara
1NUSNNI-NanoCore, Singapore Synchrotron Light Source, and Department of Physics,
National University of Singapore
, Singapore 117576
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I. Santoso;
I. Santoso
1NUSNNI-NanoCore, Singapore Synchrotron Light Source, and Department of Physics,
National University of Singapore
, Singapore 1175762Jurusan Fisika, FMIPA,
Universitas Gadjah Mada
, BLS 21 Yogyakarta 55281, Indonesia
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a)
Author to whom correspondence should be addressed. Electronic mail: [email protected]
Rev. Sci. Instrum. 85, 123116 (2014)
Article history
Received:
September 16 2014
Accepted:
September 28 2014
Citation
T. C. Asmara, I. Santoso, A. Rusydi; Self-consistent iteration procedure in analyzing reflectivity and spectroscopic ellipsometry data of multilayered materials and their interfaces. Rev. Sci. Instrum. 1 December 2014; 85 (12): 123116. https://doi.org/10.1063/1.4897487
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