The present paper proposes a method for positioning and control of dielectric sheet displacement using a novel built-in position sensor for an electrostatic induction sheet conveyor (EISC) which is used for dielectric sheet conveying. The actuator utilizes electrostatic actuation technology based on induced charges and can be used in automated systems for conveying dielectric sheets. The proposed sensing system superimposes a high-frequency sensors signal onto a low-frequency driving signal and uses the actuator's electrodes for position sensing. The operational principle of the built-in sensor is similar to typical capacitance-type linear encoder. In this paper, details of the built-in position sensor based on the exact model of the actuator and feedback position control are reported. The experimental results confirmed that the sensor can work successfully by sharing the same electrodes with the driving operation.

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