Atomic Force Microscopes (AFM) are used for generating surface topography of samples at micro to atomic resolutions. Many commercial AFMs use piezoelectric tube nanopositioners for scanning. Scanning rates of these microscopes are hampered by the presence of low frequency resonant modes. When inadvertently excited, these modes lead to high amplitude mechanical vibrations causing the loss of accuracy, while scanning, and eventually to break down of the tube. Feedback control has been used to damp these resonant modes. Thereby, enabling higher scanning rates. Here, a multivariable controller is designed to damp the first resonant mode along both the x and y axis. Exploiting the inherent symmetry in the piezoelectric tube, the multivariable control design problem is recast as independent single-input single-output (SISO) designs. This in conjunction with integral resonant control is used for damping the first resonant mode.
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February 2013
Research Article|
February 12 2013
Diagonal control design for atomic force microscope piezoelectric tube nanopositioners
B. Bhikkaji;
B. Bhikkaji
a)
1
Indian Institute of Technology Madras
, Chennai, India
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Y. K. Yong;
Y. K. Yong
b)
2School of Electrical Engineering and Computer Science,
The University of Newcastle
, Callaghan, NSW 2308, Australia
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I. A. Mahmood;
I. A. Mahmood
c)
3Department of Mechatronics Engineering,
International Islamic University Malaysia
, Malaysia
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S. O. R. Moheimani
S. O. R. Moheimani
d)
2School of Electrical Engineering and Computer Science,
The University of Newcastle
, Callaghan, NSW 2308, Australia
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a)
Electronic mail: [email protected].
b)
Electronic mail: [email protected].
c)
Electronic mail: [email protected].
d)
Corresponding author. Electronic mail: [email protected].
Rev. Sci. Instrum. 84, 023705 (2013)
Article history
Received:
May 31 2012
Accepted:
January 23 2013
Citation
B. Bhikkaji, Y. K. Yong, I. A. Mahmood, S. O. R. Moheimani; Diagonal control design for atomic force microscope piezoelectric tube nanopositioners. Rev. Sci. Instrum. 1 February 2013; 84 (2): 023705. https://doi.org/10.1063/1.4790474
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