Microcantilever with integrated piezoresistor has been applied to in situ surface stress measurement in the field of biochemical sensors. It is well known that piezoresistive cantilever-based sensors are sensitive to ambient temperature changing due to highly temperature-dependent piezoresistive effect and mismatch in thermal expansion of composite materials. This paper proposes a novel method of temperature drift compensation for microcantilever-based sensors with a piezoresistive full Wheatstone bridge integrated at the clamped ends by subtracting the amplified output voltage of the reference cantilever from the output voltage of the sensing cantilever through a simple temperature compensating circuit. Experiments show that the temperature drift of microcantilever sensors can be significantly reduced by the method.
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March 2012
Research Article|
March 08 2012
A novel method of temperature compensation for piezoresistive microcantilever-based sensors
Jianqiang Han;
Jianqiang Han
a)
1College of Mechanical and Electrical Engineering,
China Jiliang University
, 258 Xueyuan Road, Xiasha High-Edu Park, Hangzhou 310018, China
2State Key Laboratory of Transducer Technology,
Shanghai Institute of Microsystem and Information Technology
, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China
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Xiaofei Wang;
Xiaofei Wang
1College of Mechanical and Electrical Engineering,
China Jiliang University
, 258 Xueyuan Road, Xiasha High-Edu Park, Hangzhou 310018, China
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Tianhong Yan;
Tianhong Yan
1College of Mechanical and Electrical Engineering,
China Jiliang University
, 258 Xueyuan Road, Xiasha High-Edu Park, Hangzhou 310018, China
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Yan Li;
Yan Li
1College of Mechanical and Electrical Engineering,
China Jiliang University
, 258 Xueyuan Road, Xiasha High-Edu Park, Hangzhou 310018, China
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Meixuan Song
Meixuan Song
1College of Mechanical and Electrical Engineering,
China Jiliang University
, 258 Xueyuan Road, Xiasha High-Edu Park, Hangzhou 310018, China
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a)
Author to whom correspondence should be addressed. Electronic mail: [email protected]. Tel.: +86-571-8687-5664. Fax: +86-571-8687-5664.
Rev. Sci. Instrum. 83, 035002 (2012)
Article history
Received:
November 19 2011
Accepted:
February 10 2012
Citation
Jianqiang Han, Xiaofei Wang, Tianhong Yan, Yan Li, Meixuan Song; A novel method of temperature compensation for piezoresistive microcantilever-based sensors. Rev. Sci. Instrum. 1 March 2012; 83 (3): 035002. https://doi.org/10.1063/1.3690380
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