Vacuum arc ion sources have been made and used by a large number of research groups around the world over the past twenty years. The first generation of vacuum arc ion sources (dubbed “Mevva,” for metal vapor vacuum arc) was developed at Lawrence Berkeley National Laboratory in the 1980s. This paper considers the design, performance parameters, and some applications of a new modified version of this kind of source which we have called Mevva-V.Ru. The source produces broad beams of metal ions at an extraction voltage of up to 60 kV and a time-averaged ion beam current in the milliampere range. Here, we describe the Mevva-V.Ru vacuum arc ion source that we have developed at Tomsk and summarize its beam characteristics along with some of the applications to which we have put it. We also describe the source performance using compound cathodes.
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February 2012
14th International Conference on Ion Sources (ICIS 2011)
12-16 September 2011
Giardini-Naxos, Sicily (Italy)
Research Article|
February 01 2012
Upgraded vacuum arc ion source for metal ion implantationa)
A. G. Nikolaev;
A. G. Nikolaev
b)
1High Current Electronics Institute,
Siberian Division of the Russian Academy of Science
, Tomsk 634055, Russia
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E. M. Oks;
E. M. Oks
1High Current Electronics Institute,
Siberian Division of the Russian Academy of Science
, Tomsk 634055, Russia
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K. P. Savkin;
K. P. Savkin
1High Current Electronics Institute,
Siberian Division of the Russian Academy of Science
, Tomsk 634055, Russia
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G. Yu. Yushkov;
G. Yu. Yushkov
1High Current Electronics Institute,
Siberian Division of the Russian Academy of Science
, Tomsk 634055, Russia
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I. G. Brown
I. G. Brown
2
Lawrence Berkeley National Laboratory
, Berkeley, California 94720, USA
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b)
Author to whom correspondence should be addressed. Electronic mail: [email protected].
a)
Contributed paper, published as part of the Proceedings of the 14th International Conference on Ion Sources, Giardini Naxos, Italy, September, 2011.
Rev. Sci. Instrum. 83, 02A501 (2012)
Article history
Received:
August 23 2011
Accepted:
September 24 2011
Citation
A. G. Nikolaev, E. M. Oks, K. P. Savkin, G. Yu. Yushkov, I. G. Brown; Upgraded vacuum arc ion source for metal ion implantation. Rev. Sci. Instrum. 1 February 2012; 83 (2): 02A501. https://doi.org/10.1063/1.3655529
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