Accurate knowledge of thermophysical properties is needed to predict and optimize the thermal performance of microsystems. Thermal conductivity is experimentally determined by measuring quantities such as voltage or temperature and then inferring a thermal conductivity from a thermal model. Thermal models used for data analysis contain inherent assumptions, and the resultant thermal conductivity value is sensitive to how well the actual experimental conditions match the model assumptions. In this paper, a modified data analysis procedure for the steady state Joule heating technique is presented that accounts for bond pad effects including thermal resistance, electrical resistance, and Joule heating. This new data analysis method is used to determine the thermal conductivity of polycrystalline silicon (polysilicon) microbridges fabricated using the Sandia National Laboratories SUMMiT V™ micromachining process over the temperature range of 77–350 K, with the value at 300 K being 71.7 ± 1.5 W/(m K). It is shown that making measurements on beams of multiple lengths is useful, if not essential, for inferring the correct thermal conductivity from steady state Joule heating measurements.
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December 2012
Research Article|
December 19 2012
Modified data analysis for thermal conductivity measurements of polycrystalline silicon microbridges using a steady state Joule heating technique
Robert A. Sayer;
Robert A. Sayer
Engineering Sciences Center, Sandia National Laboratories
, P.O. Box 5800, Albuquerque, New Mexico 87185, USA
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Edward S. Piekos;
Edward S. Piekos
Engineering Sciences Center, Sandia National Laboratories
, P.O. Box 5800, Albuquerque, New Mexico 87185, USA
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Leslie M. Phinney
Leslie M. Phinney
a)
Engineering Sciences Center, Sandia National Laboratories
, P.O. Box 5800, Albuquerque, New Mexico 87185, USA
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a)
Author to whom correspondence should be addressed. Electronic mail: lmphinn@sandia.gov.
Rev. Sci. Instrum. 83, 124904 (2012)
Article history
Received:
September 24 2012
Accepted:
November 12 2012
Citation
Robert A. Sayer, Edward S. Piekos, Leslie M. Phinney; Modified data analysis for thermal conductivity measurements of polycrystalline silicon microbridges using a steady state Joule heating technique. Rev. Sci. Instrum. 1 December 2012; 83 (12): 124904. https://doi.org/10.1063/1.4769059
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