Practical methods to clean ITER's diagnostic mirrors and restore reflectivity will be critical to ITER's plasma operations. We describe a technique to assess the efficacy of mirror cleaning techniques and detect any damage to the mirror surface. The method combines microscopic imaging and reflectivity measurements in the red, green, and blue spectral regions and at selected wavelengths. The method has been applied to laser cleaning of single crystal molybdenum mirrors coated with either carbon or beryllium films 150–420 nm thick. It is suitable for hazardous materials such as beryllium as the mirrors remain sealed in a vacuum chamber.

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