An x-ray laminography system under an x-ray microscopic condition was developed to obtain a three-dimensional structure of laterally-extended planar objects which were difficult to observe by x-ray tomography. An x-ray laminography technique was introduced to an x-ray transmission microscope with zone plate optics. Three prototype sample holders were evaluated for x-ray imaging laminography. Layered copper grid sheets were imaged as a laminated sample. Diatomite powder on a silicon nitride membrane was measured to confirm the applicability of this method to non-planar micro-specimens placed on the membrane. The three-dimensional information of diatom shells on the membrane was obtained at a spatial resolution of sub-micron. Images of biological cells on the membrane were also obtained by using a Zernike phase contrast technique.
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July 2011
Research Article|
July 19 2011
Development of x-ray laminography under an x-ray microscopic condition Available to Purchase
Masato Hoshino;
Masato Hoshino
a)
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
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Kentaro Uesugi;
Kentaro Uesugi
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
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Akihisa Takeuchi;
Akihisa Takeuchi
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
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Yoshio Suzuki;
Yoshio Suzuki
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
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Naoto Yagi
Naoto Yagi
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
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Masato Hoshino
a)
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
Kentaro Uesugi
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
Akihisa Takeuchi
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
Yoshio Suzuki
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
Naoto Yagi
Japan Synchrotron Radiation Research Institute (JASRI/SPring-8)
, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
a)
Electronic mail: [email protected].
Rev. Sci. Instrum. 82, 073706 (2011)
Article history
Received:
April 01 2011
Accepted:
June 20 2011
Citation
Masato Hoshino, Kentaro Uesugi, Akihisa Takeuchi, Yoshio Suzuki, Naoto Yagi; Development of x-ray laminography under an x-ray microscopic condition. Rev. Sci. Instrum. 1 July 2011; 82 (7): 073706. https://doi.org/10.1063/1.3609865
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