Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for specimens having lateral dimensions of several decimeters. Operating either with a monochromatic or with a white synchrotron beam, the method can be optimized to attain high sensitivity or considerable inspection throughput in synchrotron user and small-batch industrial experiments. The article describes the details of experimental setups, alignment procedures, and the underlying reconstruction principles. Imaging of interconnections in flip-chip and wire-bonded devices illustrates the peculiarities of the method compared to its alternatives and demonstrates the wide application potential for the 3D inspection and quality assessment in microsystem technology.
REFERENCES
1.
S.
Stock
, Int. Mater. Rev.
53
, 129
(2008
).2.
Advanced Tomographic Methods in Materials Research and Engineering
, edited by J.
Banhart
(Oxford University Press
, New York
, 2008
).3.
P.
Tafforeau
, R.
Boistel
, E.
Boller
, A.
Bravin
, M.
Brunet
, Y.
Chaimanee
, P.
Cloetens
, M.
Feist
, J.
Hoszowska
, J.
Jaeger
, R. F.
Kay
, V.
Lazzari
, L.
Marivaux
, A.
Nel
, C.
Nemoz
, X.
Thibault
, P.
Vignaud
, S.
Zabler
, Appl. Phys. A: Mater. Sci. Process.
83
, 195
(2006
).4.
R.
Cesareo
, A. L.
Hanson
, G. E.
Gigante
, L. J.
Pedraza
, and S. Q.G.
Mathaboally
, Phys. Rep.
213
, 117
(1992
).5.
F. A.
Dilmanian
, X. Y.
Wu
, E. C.
Parsons
, B.
Ren
, J.
Kress
, T. M.
Button
, L. D.
Chapman
, J. A.
Coderre
, F.
Giron
, D.
Greenberg
, D. J.
Krus
, Z.
Liang
, S.
Marcovici
, M. J.
Petersen
, C. T.
Roque
, M.
Shleifer
, D. N.
Slatkin
, W. C.
Thomlinson
, K.
Yamamoto
, Z.
Zhong
, Phys. Med. Biol.
42
, 371
(1997
).6.
K. A.
Nugent
, T. E.
Gureyev
, D. F.
Cookson
, D.
Paganin
, and Z.
Barnea
, Phys. Rev. Lett.
77
, 2961
(1996
).7.
P.
Cloetens
, W.
Ludwig
, J.
Baruchel
, D.
van Dyck
, J.
van Landuyt
, J.
Guigay
, and M.
Schlenker
, Appl. Phys. Lett.
75
, 2912
(1999
).8.
D.
Paganin
, S. C.
Mayo
, T. E.
Gureyev
, P. R.
Miller
, and S. W.
Wilkins
, J. Microsc.
206
, 33
(2002
).9.
10.
A.
Kyrieleis
, V.
Titarenko
, M.
Ibison
, T.
Connolley
, and P. J.
Withers
, J. Microsc.
241
, 69
(2011
).11.
L.
Helfen
, T.
Baumbach
, P.
Mikulík
, D.
Kiel
, P.
Pernot
, P.
Cloetens
, and J.
Baruchel
, Appl. Phys. Lett.
86
, 071915
(2005
).12.
L.
Helfen
, T.
Baumbach
, P.
Cloetens
, and J.
Baruchel
, Appl. Phys. Lett.
94
, 104103
(2009
).13.
N.
Watanabe
, M.
Hoshino
, K.
Yamamoto
, S.
Aoki
, A.
Takeuchi
, and Y.
Suzuki
, J. Phys.: Conf. Ser.
186
, 012022
(2009
).14.
L.
Helfen
, F.
Xu
, B.
Schillinger
, E.
Calzada
, I.
Zanette
, T.
Weitkamp
, and T.
Baumbach
, “Neutron laminography - a novel approach to three-dimensional imaging of flat objects with neutrons
,” Nucl. Inst. Meth. A
(in press).15.
L.
Helfen
, A.
Myagotin
, P.
Pernot
, M.
Di Michiel
, P.
Mikulík
, A.
Berthold
, and T.
Baumbach
, Nucl. Inst. Meth. A
563
, 163
(2006
).16.
L.
Helfen
, A.
Myagotin
, A.
Rack
, P.
Pernot
, P.
Mikulík
, M. D.
Michiel
, and T.
Baumbach
, Phys. Status Solidi A
204
, 2760
(2007
).17.
K.
Krug
, L.
Porra
, P.
Coan
, A.
Wallert
, J.
Dik
, A.
Coerdt
, A.
Bravin
, M.
Elyyan
, P.
Reischig
, L.
Helfen
, T.
Baumbach
, J. Synchrotron Radiat.
15
, 55
(2008
).18.
J.
Dik
, P.
Reischig
, K.
Krug
, A.
Wallert
, A.
Coerdt
, L.
Helfen
, and T.
Baumbach
, J. Am. Inst. Conserv.
48
, 185
(2009
).19.
A.
Houssaye
, F.
Xu
, L.
Helfen
, V. D.
Buffrénil
, T.
Baumbach
, and P.
Tafforeau
, J. Vertebr. Paleontol.
31
, 2
(2011
).20.
A. J.
Moffat
, P.
Wright
, L.
Helfen
, T.
Baumbach
, G.
Johnson
, S. M.
Spearing
, and I.
Sinclair
, Scr. Mater.
62
, 97
(2010
).21.
F.
Xu
, L.
Helfen
, A. J.
Moffat
, G.
Johnson
, I.
Sinclair
, and T.
Baumbach
, J. Synchrotron Radiat.
17
, 222
(2010
).22.
D.
Shimao
, T.
Kunisada
, H.
Sugiyama
, and M.
Ando
, Jpn. J. Appl. Phys.
46
, L608
(2007
).23.
A.
Maksimenko
, T.
Yuasa
, M.
Ando
, and E.
Hashimoto
, Appl. Phys. Lett.
91
, 234108
(2007
).24.
S.
Gondrom
, J.
Zhou
, M.
Maisl
, H.
Reiter
, M.
Kröning
, and W.
Arnold
, Nucl. Eng. Des.
190
, 141
(1999
).25.
J. T.
Dobbins
III and D. J.
Godfrey
, Phys. Med. Biol.
48
, R65
(2003
).26.
B. G.
Ziedses des Plantes
, Acta Radiol.
13
, 182
(1932
).27.
R.
Gordon
and G.
Herman
, International Review of Cytology
, (Academic
, New York
, 1974
), Vol. 38
, pp. 111
–151
.28.
T.
Weitkamp
, P.
Tafforeau
, E.
Boller
, P.
Cloetens
, J.-P.
Valade
, P.
Bernard
, F.
Peyrin
, W.
Ludwig
, L.
Helfen
, and J.
Baruchel
, AIP Conf. Proc.
1234
, 83
(2010
).29.
T.
Weitkamp
, P.
Tafforeau
, E.
Boller
, P.
Cloetens
, J.-P.
Valade
, P.
Bernard
, F.
Peyrin
, W.
Ludwig
, L.
Helfen
, and J.
Baruchel
, AIP Conf. Proc.
1221
, 33
(2010
).30.
M.
Di Michiel
, J. M.
Merino
, D.
Fernandez-Carreiras
, T.
Buslaps
, V.
Honkimäki
, P.
Falus
, T.
Martins
, and O.
Svensson
, Rev. Sci. Instrum.
76
, 043702
(2005
).31.
S.
Chilingaryan
, A.
Mirone
, A.
Hammersley
, C.
Ferrero
, L.
Helfen
, A.
Kopmann
, T.
dos Santos Rolo
, and P.
Vagovic
, “A GPU-Based Architecture for Real-Time Data Assessment at Synchrotron Experiments,” IEEE Trans. Nucl. Sci.
(in press).32.
G.
Lauritsch
and W. H.
Härer
, Proc. SPIE
3338
, 1127
(1999
).33.
H.
Matsui
, A.
Iwata
, I.
Horiba
, and N.
Suzumura
, IEEE Trans. Med. Imaging
12
, 307
(1993
).34.
L.
Helfen
, T.
Baumbach
, P.
Pernot
, P.
Mikulík
, M.
Di Michiel
, and J.
Baruchel
, Proc. SPIE
6318
, 63180N
(2006
).35.
A.
Voropaev
, Master's thesis, Universität des Saarlandes
2009
.36.
G.
Ramachandran
and A.
Lakshminarayanan
, Proc. Natl. Acad. Sci. U.S.A.
68
, 2236
(1971
).37.
A. C.
Kak
and M.
Slaney
, Principles of Computerized Tomographic Imaging
(IEEE Press
, New York
, 1988
).© 2011 American Institute of Physics.
2011
American Institute of Physics
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