In order to achieve nondestructive observation of the three-dimensional spatially resolved electronic structure of solids, we have developed a scanning photoelectron microscope system with the capability of depth profiling in electron spectroscopy for chemical analysis (ESCA). We call this system 3D nano-ESCA. For focusing the x-ray, a Fresnel zone plate with a diameter of 200 μm and an outermost zone width of 35 nm is used. In order to obtain the angular dependence of the photoelectron spectra for the depth-profile analysis without rotating the sample, we adopted a modified VG Scienta R3000 analyzer with an acceptance angle of 60° as a high-resolution angle-resolved electron spectrometer. The system has been installed at the University-of-Tokyo Materials Science Outstation beamline, BL07LSU, at SPring-8. From the results of the line-scan profiles of the poly-Si/high-k gate patterns, we achieved a total spatial resolution better than 70 nm. The capability of our system for pinpoint depth-profile analysis and high-resolution chemical state analysis is demonstrated.
Skip Nav Destination
Article navigation
November 2011
Research Article|
November 03 2011
Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis
K. Horiba;
K. Horiba
a)
1Department of Applied Chemistry,
The University of Tokyo
, Tokyo 113-8656, Japan
2Synchrotron Radiation Research Organization,
The University of Tokyo
, Tokyo 113-8656, Japan
3Core Research for Evolutional Science and Technology (CREST),
Japan Science and Technology Agency (JST)
, Tokyo 102-0075, Japan
Search for other works by this author on:
Y. Nakamura;
Y. Nakamura
1Department of Applied Chemistry,
The University of Tokyo
, Tokyo 113-8656, Japan
Search for other works by this author on:
N. Nagamura;
N. Nagamura
1Department of Applied Chemistry,
The University of Tokyo
, Tokyo 113-8656, Japan
Search for other works by this author on:
S. Toyoda;
S. Toyoda
1Department of Applied Chemistry,
The University of Tokyo
, Tokyo 113-8656, Japan
Search for other works by this author on:
H. Kumigashira;
H. Kumigashira
1Department of Applied Chemistry,
The University of Tokyo
, Tokyo 113-8656, Japan
2Synchrotron Radiation Research Organization,
The University of Tokyo
, Tokyo 113-8656, Japan
4Precursory Research for Embryonic Science and Technology (PRESTO),
Japan Science and Technology Agency (JST)
, Saitama 332-0012, Japan
Search for other works by this author on:
M. Oshima;
M. Oshima
1Department of Applied Chemistry,
The University of Tokyo
, Tokyo 113-8656, Japan
2Synchrotron Radiation Research Organization,
The University of Tokyo
, Tokyo 113-8656, Japan
3Core Research for Evolutional Science and Technology (CREST),
Japan Science and Technology Agency (JST)
, Tokyo 102-0075, Japan
Search for other works by this author on:
K. Amemiya;
K. Amemiya
3Core Research for Evolutional Science and Technology (CREST),
Japan Science and Technology Agency (JST)
, Tokyo 102-0075, Japan
5Photon Factory, Institute of Materials Structure Science,
High Energy Accelerator Research Organization (KEK)
, Tsukuba 305-0801, Japan
Search for other works by this author on:
H. Ohashi
H. Ohashi
6
JASRI/SPring-8
, Hyogo 679-5198, Japan
Search for other works by this author on:
a)
Electronic mail: horiba@sr.t.u-tokyo.ac.jp.
Rev. Sci. Instrum. 82, 113701 (2011)
Article history
Received:
May 11 2011
Accepted:
October 08 2011
Citation
K. Horiba, Y. Nakamura, N. Nagamura, S. Toyoda, H. Kumigashira, M. Oshima, K. Amemiya, Y. Senba, H. Ohashi; Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis. Rev. Sci. Instrum. 1 November 2011; 82 (11): 113701. https://doi.org/10.1063/1.3657156
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Sign in via your Institution
Sign in via your InstitutionPay-Per-View Access
$40.00
Citing articles via
Related Content
Direct observation of charge transfer region at interfaces in graphene devices
Appl. Phys. Lett. (June 2013)
Development of soft x-ray time-resolved photoemission spectroscopy system with a two-dimensional angle-resolved time-of-flight analyzer at SPring-8 BL07LSU
Rev. Sci. Instrum. (February 2012)
Ultrahigh resolution soft x-ray emission spectrometer at BL07LSU in SPring-8
Rev. Sci. Instrum. (January 2012)
The EMBL‐Hamburg imaging plate scanner (abstract)
Rev Sci Instrum (January 1992)
Molybdenum Disulfide Single Crystal (0002) Plane XPS Spectra
Surface Science Spectra (January 2000)