The surface conductivity measurement system using a micro-four-point probe (M4PP) had been developed for the ultrahigh vacuum transmission electron microscope (UHV-TEM). Since the current distribution in the sample crystals during the current voltage measurement by the M4PP is localized within the depth of several micrometers from the surface, the system is sensitive to the surface conductivity, which is related with the surface superstructure. It was installed in the main chamber of the TEM and the surface conductivity can be measured in situ. The surface structures were observed by reflection electron microscopy and diffraction (REM-RHEED). REM-RHEED enables us to observe the surface superstructures and their structure defects such as surface atomic steps and domain boundaries of the surface superstructure. Thus the effects of the defects on the surface conductivity can be investigated. In the present paper we present the surface conductivity measurement system and its application to the surface prepared on the Si(111) vicinal surfaces. The result clearly showed that the surface conductivity was affected by step configuration.
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November 2009
Research Article|
November 02 2009
Development of a surface conductivity measurement system for ultrahigh vacuum transmission electron microscope Available to Purchase
H. Minoda;
H. Minoda
a)
1Department of Applied Physics,
Tokyo University of Agriculture and Technology
, Koganei, Tokyo 184-8588, Japan
2CREST,
Japan Science and Technology Agency
, Kawaguchi, Saitama 332-0012, Japan
Search for other works by this author on:
K. Hatano;
K. Hatano
1Department of Applied Physics,
Tokyo University of Agriculture and Technology
, Koganei, Tokyo 184-8588, Japan
Search for other works by this author on:
H. Yazawa
H. Yazawa
1Department of Applied Physics,
Tokyo University of Agriculture and Technology
, Koganei, Tokyo 184-8588, Japan
Search for other works by this author on:
H. Minoda
1,2,a)
K. Hatano
1
H. Yazawa
1
1Department of Applied Physics,
Tokyo University of Agriculture and Technology
, Koganei, Tokyo 184-8588, Japan
2CREST,
Japan Science and Technology Agency
, Kawaguchi, Saitama 332-0012, Japan
a)
Author to whom correspondence should be addressed. Electronic mail: [email protected].
Rev. Sci. Instrum. 80, 113702 (2009)
Article history
Received:
July 08 2009
Accepted:
September 27 2009
Citation
H. Minoda, K. Hatano, H. Yazawa; Development of a surface conductivity measurement system for ultrahigh vacuum transmission electron microscope. Rev. Sci. Instrum. 1 November 2009; 80 (11): 113702. https://doi.org/10.1063/1.3251272
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