A new configuration of conductive atomic force microscope (CAFM) is presented, which is based in a standard CAFM where the typical converter has been replaced by a amplifier. This substitution extends the current dynamic range from . With the broadening of the current dynamic range, the CAFM can access new applications, such as the reliability evaluation of metal-oxide-semiconductor gate dielectrics. As an example, the setup has been tested by analyzing breakdown spots induced in layers.
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© 2008 American Institute of Physics.
2008
American Institute of Physics
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