Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition

A flexible dual-channel curvilinear electromagnetic filter has been designed and constructed to fabricate multilayered composite films in vacuum arc ion plating. The filter possesses two guiding channels and one mixing unit. Multilayered $TiN∕AlN$ and TiAlN composite films can be produced by controlling the frequency or interval of the two cathodes. The x-ray photoelectron spectroscopy and low-angle x-ray diffraction results reveal the periodic Ti and Al structures in the $TiN∕AlN$ films. The TiAlN films exhibit a smooth surface morphology confirming effective filtering of macroparticles by the filter. High temperature oxidation conducted at $700°C$ for an hour indicates that the weight increment in the TiAlN films produced by the dual filter is only half of that of the TiAlN films produced without a filter, thereby showing better resistance against surface oxidation.