We report on a technique for making high-throughput residual stress measurements on thin films by means of micromachined cantilever beams and an array of parallel laser beams. In this technique, the film of interest is deposited onto a silicon substrate with micromachined cantilever beams. The residual stress in the film causes the beams to bend. The curvature of the beams, which is proportional to the residual stress in the film, is measured by scanning an array of parallel laser beams generated with a diffraction grating along the length of the beams. The reflections of the laser beams are captured using a digital camera. A heating stage enables measurement of the residual stress as a function of temperature. As the curvature of each beam is determined by the local stress in the film, the film stress can be mapped across the substrate. This feature makes the technique a useful tool for the combinatorial analysis of phase transformations in thin films, especially when combined with the use of films with lateral composition gradients. As an illustration, we apply the technique to evaluate the thermomechanical behavior of Fe–Pd binary alloys as a function of composition.
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April 2008
Research Article|
April 30 2008
High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams
Hyun-Jong Kim;
Hyun-Jong Kim
1School of Engineering and Applied Sciences,
Harvard University
, Cambridge, Massachusetts 02138, USA
2Department of Materials Science and Engineering,
Seoul National University
, San 56-1, Sillim-dong, Kwanak-gu, Seoul 151-744, Republic of Korea
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Jun-Hyun Han;
Jun-Hyun Han
1School of Engineering and Applied Sciences,
Harvard University
, Cambridge, Massachusetts 02138, USA
3Division of Materials Science and Engineering,
Korea Institute of Science and Technology (KIST)
, P.O. Box 131, Cheongryang, Seoul 130-650, Republic of Korea
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Roy Kaiser;
Roy Kaiser
1School of Engineering and Applied Sciences,
Harvard University
, Cambridge, Massachusetts 02138, USA
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Kyu Hwan Oh;
Kyu Hwan Oh
2Department of Materials Science and Engineering,
Seoul National University
, San 56-1, Sillim-dong, Kwanak-gu, Seoul 151-744, Republic of Korea
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Joost J. Vlassak
Joost J. Vlassak
a)
1School of Engineering and Applied Sciences,
Harvard University
, Cambridge, Massachusetts 02138, USA
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a)
Electronic mail: [email protected].
Rev. Sci. Instrum. 79, 045112 (2008)
Article history
Received:
March 20 2008
Accepted:
March 31 2008
Citation
Hyun-Jong Kim, Jun-Hyun Han, Roy Kaiser, Kyu Hwan Oh, Joost J. Vlassak; High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams. Rev. Sci. Instrum. 1 April 2008; 79 (4): 045112. https://doi.org/10.1063/1.2912826
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