A high energy focused ion beam microprobe using a doublet arrangement of short magnetic quadrupole lenses was used to focus 13MeV protons to spot sizes of 1×1μm2 and 14.5MeV carbon and silicon ion beams to spot sizes of 1.5×1.5μm2. The results presented clearly demonstrate that this simple doublet configuration can provide high energy microbeams for microananalysis and microfabrication applications.

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