A high energy focused ion beam microprobe using a doublet arrangement of short magnetic quadrupole lenses was used to focus protons to spot sizes of and carbon and silicon ion beams to spot sizes of . The results presented clearly demonstrate that this simple doublet configuration can provide high energy microbeams for microananalysis and microfabrication applications.
Magnetic quadrupole doublet focusing system for high energy ions
Gary A. Glass, Alexander D. Dymnikov, Bibhudutta Rout, Johnny F. Dias, Louis M. Houston, Jared LeBlanc; Magnetic quadrupole doublet focusing system for high energy ions. Rev. Sci. Instrum. 1 March 2008; 79 (3): 036102. https://doi.org/10.1063/1.2890101
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