For the past four years a joint research and development effort designed to develop steady state, intense ion sources has been in progress with the ultimate goal to develop ion sources and techniques that meet the two energy extreme range needs of meV and hundreads of eV ion implanters. This endeavor has already resulted in record steady state output currents of high charge state of antimony and phosphorus ions: P2+ [8.6pmA (particle milliampere)], P3+(1.9pmA), and P4+(0.12pmA) and 16.2, 7.6, 3.3, and 2.2pmA of Sb3+Sb4+, Sb5+, and Sb6+ respectively. For low energy ion implantation, our efforts involve molecular ions and a novel plasmaless/gasless deceleration method. To date, 1emA (electrical milliampere) of positive decaborane ions was extracted at 10keV and smaller currents of negative decaborane ions were also extracted. Additionally, boron current fraction of over 70% was extracted from a Bernas-Calutron ion source, which represents a factor of 3.5 improvement over currently employed ion sources.

1.
A. S.
Bugaev
,
V. I.
Gushenets
,
E. M.
Oks
,
G. Yu.
Yushkov
,
T. V.
Kulevoy
,
A.
Hershcovitch
, and
B. M.
Johnson
,
Appl. Phys. Lett.
79
,
919
(
2001
).
2.
V. A.
Batalin
,
A. S.
Bugaev
,
V. I.
Gushenets
,
A.
Hershcovitch
,
B. M.
Johnson
,
A. A.
Kolomiets
,
R. P.
Kuibeda
,
T. V.
Kulevoy
,
E. M.
Oks
,
V. I.
Pershin
,
S. V.
Petrenko
,
D. N.
Seleznev
, and
G. Yu.
Yushkov
,
J. Appl. Phys.
92
,
2884
(
2002
).
3.
V. A.
Batalin
,
A. S.
Bugaev
,
V. I.
Gushenets
,
A.
Hershcovitch
,
B. M.
Johnson
,
A. A.
Kolomiets
,
R. P.
Kuibeda
,
B. K.
Kondratiev
,
T. V.
Kulevoy
,
I. V.
Litovko
,
E. M.
Oks
,
V. I.
Pershin
,
H. J.
Poole
,
S. V.
Petrenko
,
D. N.
Seleznev
,
A. Ya.
Svarovski
,
V. I.
Turchin
, and
G. Yu.
Yushkov
,
Rev. Sci. Instrum.
75
,
1900
(
2004
).
4.
V. V.
Simonov
,
L. A.
Kornilov
,
A. V.
Shashelev
, and
E. V.
Shokin
,
Ion Implantation Equipment
(
Radio i Svjaz’
,
Moscow
,
1988
) (in Russian).
5.
I.
Chavet
and
R.
Bernas
,
Nucl. Instrum. Methods
51
,
7
(
1967
).
6.
Ion Implantation Techniques
, edited by
H.
Rassel
and
H.
Glawischnig
(
Springer
,
New York
,
1982
), p.
39
.
7.
V. I.
Gushenets
,
A. S.
Bugaev
,
E. M.
Oks
,
A.
Hershcovitch
,
B. M.
Johnson
,
T. V.
Kulevoy
,
H. J.
Poole
, and
A. Ya.
Svarovski
,
Rev. Sci. Instrum.
76
,
083301
(
2005
).
8.
T. N.
Horsky
,
Rev. Sci. Instrum.
69
,
840
(
1998
).
9.
K.
Saadatmand
,
Rev. Sci. Instrum.
69
,
859
(
1998
).
10.
T. V.
Kulevoy
,
R. P.
Kuibeda
,
S. V.
Petrenko
,
V. A.
Batalin
,
V. I.
Pershin
,
N.
Kropachev
,
A.
Hershcovitch
,
B. M.
Johnson
,
V. I.
Gushenets
,
E. M.
Oks
, and
H. J.
Poole
,
Rev. Sci. Instrum.
77
,
03C110
(
2006
).
11.
T. V.
Kulevoy
,
S. V.
Petrenko
,
R. P.
Kuibeda
,
D. N.
Seleznev
,
V. A.
Koshelev
,
A. V.
Koslov
,
Yu. B.
Stasevich
,
A. L.
Sitnikov
,
I. M.
Shamalinov
,
V. I.
Pershin
,
A.
Hershcovitch
,
B. M.
Johnson
,
E. M.
Oks
,
V. I.
Gushenets
,
H. J.
Poole
,
E. S.
Masunov
, and
S. M.
Polozov
,
Rev. Sci. Instrum.
(these proceedings).
12.
A.
Hershcovitch
,
V. A.
Batalin
,
A. S.
Bugaev
,
V. I.
Gushenets
,
B. M.
Johnson
,
A. A.
Kolomiets
,
G. N.
Kropachev
,
R. P.
Kuibeda
,
T. V.
Kulevoy
,
I. V.
Litovko
,
E. S.
Masunov
,
E. M.
Oks
,
V. I.
Pershin
,
S. V.
Petrenko
,
S. M.
Polozov
,
H. J.
Poole
,
I.
Rudskoy
,
D. N.
Seleznev
,
P. A.
Storozhenko
,
A. Ya.
Svarovski
, and
G. Yu.
Yushkov
,
Rev. Sci. Instrum.
77
,
03B510
(
2006
).
13.
S. V.
Petrenko
,
R. P.
Kuibeda
,
T. V.
Kulevoy
,
V. A.
Batalin
,
V. I.
Pershin
,
A. V.
Koslov
,
Yu. B.
Stasevich
,
V. A.
Koshelev
,
A.
Hershcovitch
,
B. M.
Johnson
,
E. M.
Oks
,
V. I.
Gushenets
, and
H. J.
Poole
,
AIP Conf. Proc.
925
,
333
(
2007
).
14.
S. V.
Petrenko
,
G. N.
Kropachev
,
R. P.
Kuibeda
,
T. V.
Kulevoy
,
V. I.
Pershin
,
E. S.
Masunov
,
S. M.
Polozov
,
A.
Hershcovitch
,
B. M.
Johnson
, and
H. J.
Poole
,
Rev. Sci. Instrum.
77
,
03C112
(
2006
).
15.
A.
Hershcovitch
,
V. A.
Batalin
,
A. S.
Bugaev
,
V. I.
Gushenets
,
B. M.
Johnson
,
A. A.
Kolomiets
,
G. N.
Kropachev
,
R. P.
Kuibeda
,
T. V.
Kulevoy
,
I. V.
Litovko
,
E. S.
Masunov
,
E. M.
Oks
,
V. I.
Pershin
,
S. V.
Petrenko
,
S. M.
Polozov
,
H. J.
Poole
,
I.
Rudskoy
,
D. N.
Seleznev
,
P. A.
Storozhenko
,
A. Ya.
Svarovski
, and
G. Yu.
Yushkov
,
AIP Conf. Proc.
866
,
369
(
2006
).
16.
I.
Rudskoy
,
T. V.
Kulevoy
,
S. V.
Petrenko
,
R. P.
Kuibeda
,
D. N.
Seleznev
,
V. I.
Pershin
,
A.
Hershcovitch
,
B. M.
Johnson
,
V. I.
Gushenets
,
E. M.
Oks
, and
H. P.
Poole
,
Rev. Sci. Instrum.
(these proceedings).
17.
V. I.
Gushenets
,
A. S.
Bugaev
,
E. M.
Oks
,
A.
Hershcovitch
,
T. V.
Kulevoy
, and
I. G.
Brown
,
Rev. Sci. Instrum.
(these proceedings).
18.
V. I.
Gushenets
,
A. S.
Bugaev
,
E. M.
Oks
,
A.
Hershcovitch
,
B. M.
Johnson
,
T. V.
Kulevoy
,
H. J.
Poole
, and
A. Ya.
Svarovski
,
Rev. Sci. Instrum.
77
,
03C109
(
2006
).
19.
V. I.
Gushenets
,
E. M.
Oks
,
A.
Hershcovitch
, and
B. M.
Johnson
,
Rev. Sci. Instrum.
(these proceedings).
You do not currently have access to this content.