Highly sensitive magnetic detection of electron spin resonance (ESR) using a microcantilever is presented. By combining a modulation technique with the use of a piezoresistive cantilever, we successfully observed ESR signals of a tiny single crystal (mass<1μg) of Co Tutton salt, Co(NH4)2(SO4)26H2O, in the frequency region of 80–240 GHz. The achieved spin sensitivity was 109spins/G at 4.5 K, providing promising applications to high-resolution and high-sensitivity terahertz ESR.

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