Plasma-based technology is of great importance for a range of industrial applications. However, due to the complexity of gas-phase and surface chemical reactions, the underlying plasma chemistry is still poorly understood, leading to a growing demand for experimental setups on plasma diagnostics. In this paper, we report an apparatus that combines tunable synchrotron vacuum ultraviolet (VUV) photoionization with molecular-beam mass spectrometry for detecting ionic and neutral species formed in the processes of plasma discharge. The products including reactive intermediates such as enols can be identified unambiguously with the measurements of photoionization mass spectrometry (PIMS) and photoionization efficiency spectra. The tunable VUV PIMS has been proven as an ideal and sensitive tool for a comprehensive understanding of plasma chemistry.
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October 2008
Research Article|
October 21 2008
Low temperature plasma diagnostics with tunable synchrotron vacuum ultraviolet photoionization mass spectrometry
Jing Wang;
Jing Wang
1National Synchrotron Radiation Laboratory,
University of Science and Technology of China
, Hefei, Anhui 230029, People’s Republic of China
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Yuyang Li;
Yuyang Li
1National Synchrotron Radiation Laboratory,
University of Science and Technology of China
, Hefei, Anhui 230029, People’s Republic of China
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Zhenyu Tian;
Zhenyu Tian
1National Synchrotron Radiation Laboratory,
University of Science and Technology of China
, Hefei, Anhui 230029, People’s Republic of China
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Taichang Zhang;
Taichang Zhang
1National Synchrotron Radiation Laboratory,
University of Science and Technology of China
, Hefei, Anhui 230029, People’s Republic of China
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Fei Qi;
Fei Qi
a)
1National Synchrotron Radiation Laboratory,
University of Science and Technology of China
, Hefei, Anhui 230029, People’s Republic of China
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Xiaoping Tao
Xiaoping Tao
2Department of Astronomy and Applied Physics,
University of Science and Technology of China
, Hefei, Anhui 230026, People’s Republic of China
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a)
Author to whom correspondence should be addressed. Electronic mail: fqi@ustc.edu.cn. FAX: +86-551-5141078. Tel.: +86-551-3602125.
Rev. Sci. Instrum. 79, 103504 (2008)
Article history
Received:
July 11 2008
Accepted:
September 21 2008
Citation
Jing Wang, Yuyang Li, Zhenyu Tian, Taichang Zhang, Fei Qi, Xiaoping Tao; Low temperature plasma diagnostics with tunable synchrotron vacuum ultraviolet photoionization mass spectrometry. Rev. Sci. Instrum. 1 October 2008; 79 (10): 103504. https://doi.org/10.1063/1.2999906
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