Plasma-based technology is of great importance for a range of industrial applications. However, due to the complexity of gas-phase and surface chemical reactions, the underlying plasma chemistry is still poorly understood, leading to a growing demand for experimental setups on plasma diagnostics. In this paper, we report an apparatus that combines tunable synchrotron vacuum ultraviolet (VUV) photoionization with molecular-beam mass spectrometry for detecting ionic and neutral species formed in the processes of plasma discharge. The products including reactive intermediates such as enols can be identified unambiguously with the measurements of photoionization mass spectrometry (PIMS) and photoionization efficiency spectra. The tunable VUV PIMS has been proven as an ideal and sensitive tool for a comprehensive understanding of plasma chemistry.

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