A new standard mercury manometer has been developed to calibrate low vacuum gauges in the range from atmospheric pressure to 1mbar. It consists of a cistern that is a small stainless steel container used as mercury reservoir and also as the first Hg column connected to a long glass tube used as the second Hg column. Manometer scale covers the difference in Hg heights in two columns up to the length equivalent to 1000mbars. This is a novel low cost manometer with simple design, compact fabrication, better accuracy, easy operation, low vibration, and thermal stability. In order to evaluate the performance of the equipment, its generated pressures are compared with those of secondary standard, i.e., calibrated capacitance diaphragm gauge, giving the average correction factor 0.998. Different uncertainties of the generated pressures are discussed in detail along with the evaluation of correction factors. The relative uncertainty in the higher pressure side is found to be in the range of 104 which is within the limit (104).

1.
E. R.
Harrison
,
D. J.
Hatt
,
D. B.
Prowse
, and
J.
Wilbur-Ham
,
Metrologia
12
,
115
(
1976
) and references therein.
2.
P. L. M.
Heydemann
,
C. R.
Tillford
, and
R. W.
Hyland
,
J. Vac. Sci. Technol.
14
,
597
(
1977
).
3.
S. S.
Hong
,
Y. H.
Shin
, and
K. H.
Chung
, J. Korean Vac. Soc. 5,
181
187
(
1996
).
4.
A.
Ooiwa
,
M.
Ueki
, and
R.
Kaneda
,
Metrologia
30
,
565
(
1993
).
5.
M.
Ueki
and
A.
Ooiwa
,
Metrologia
30
,
579
(
1993
).
6.
J. M.
Lafferty
,
Foundations of Vacuum Science and Technology
, (
John Wiley & Sons, Inc.
,
1998
), p.
379
.
7.
C. R.
Tilford
,
Rev. Sci. Instrum.
44
,
180
(
1973
).
8.
J. M.
Lafferty
,
Foundations of Vacuum Science and Technology
(
John Wiley & Sons, Inc.
,
New York
,
1998
).
9.
J. M.
Lafferty
,
Foundations of Vacuum Science and Technology
(
John Wiley & Sons, Inc.
,
1998
), p.
378
.
10.
S. S.
Hong
,
Y. H.
Shin
, and
K. H.
Chung
,
J. Vac. Sci. Technol. A
24
,
70
(
2006
).
11.
A.
Berman
,
Total Pressure Measurements in Vacuum Technology
(
Academic
,
London
,
1985
).
12.
C. R.
Tilford
and
R. W.
Hyland
,
Metrology: Proceeding of the 11th Triennial World Congress of the International Measurementation Confederation (IMEKO)
,
Housten, TX
, 16–21 October
1988
(unpublished), p.
277
.
13.
V. B.
Gerard
,
J. Sci. Instrum.
43
,
194
(
1966
).
14.
Beuth, Berlin,
International Vocabulary of Basic and General Terms in Metrology
,
1994
.
15.
S. S.
Hong
,
Y. H.
Shin
,
K. H.
Chung
, and
I.
Arakaeva
,
Metrologia
42
,
S173
(
2005
).
16.
L.
Peksa
,
P.
Repa
,
T.
Gronych
,
J.
Tesar
, and
D.
Prazak
,
Vacuum
76
,
477
(
2004
).
17.
ISO, Guide to the Expression of Uncertainty in the Measurement
(
International Organization for standardization
,
Geneva, Switzerland
,
1993
).
18.
B. N.
Taylor
and
C. E.
Kuyatt
, NIST Technical Note No. 1227,
1994
(unpublished).
19.
A. P.
Miller
 et al.,
Metrologia
39
,
07001
(
2002
).
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