Microfabricated silicon leak for sampling planetary atmospheres with a mass spectrometer

A microfabricated silicon mass spectrometer inlet leak has been designed, fabricated, and tested. This leak achieves a much lower conductance in a smaller volume than is possible with commonly available metal or glass capillary tubing. It will also be shown that it is possible to integrate significant additional functionality, such as inlet heaters and valves, into a silicon microleak with very little additional mass. The fabricated leak is compatible with high temperature (up to $500°C$⁠) and high pressure (up to $100bars$⁠) conditions, as would be encountered on a Venus atmospheric probe. These leaks behave in reasonable agreement with their theoretically calculated conductance, although this differs between devices and from the predicted value by as much as a factor of 2. This variation is believed to be the result of nonuniformity in the silicon etching process which is characterized in this work. Future versions of this device can compensate for characterized process variations in order to produce devices in closer agreement with designed conductance values. The integration of an inlet heater into the leak device has also been demonstrated in this work.