This paper reports electrothermal actuation of silicon microcantilevers having integrated resistive heaters. Periodic electrical excitation induced periodic resistive heating in the cantilever, while the cantilever deflection was monitored with a photodetector. Excitation was either at the cantilever resonant frequency, , , or . When the time averaged maximum cantilever temperature was , the cantilever out-of-plane actuation amplitude was near the cantilever resonance frequency of . This actuation was sufficiently large to operate the cantilever in intermittent contact mode and scan a calibration grating of height of .
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Brief Report| December 11 2007
Microcantilever actuation via periodic internal heating
Jungchul Lee, William P. King; Microcantilever actuation via periodic internal heating. Rev. Sci. Instrum. 1 December 2007; 78 (12): 126102. https://doi.org/10.1063/1.2818805
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