The increasing use of micromechanical cantilevers in sensing applications causes a need for reliable readout techniques of micromechanical cantilever sensor (MCS) bending. Current optical beam deflection techniques suffer from drawbacks such as artifacts due to changes in the refraction index upon exchange of media. Here, an adaptation of the Fabry-Perot interferometer is presented that allows simultaneous determination of MCS bending and changes in the refraction index of media. Calibration of the instrument with liquids of known refraction index provides an avenue to direct measurement of bending with nanometer precision. Versatile construction of flow cells in combination with alignment features for substrate chips allows simultaneous measurement of two MCS situated either on the same, or on two different support chips. The performance of the instrument is demonstrate in several sensing applications, including adsorption experiments of alkanethioles on MCS gold surfaces, and measurement of humidity changes in air.
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October 2007
Research Article|
October 23 2007
Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry
Jana Wehrmeister;
Jana Wehrmeister
a)
Institut für Pharmazie und Molekulare Biotechnologie (IPMB) Department of Chemistry,
Ruprecht-Karls-Universität Heidelberg
, Im Neuenheimer Feld 364, D-69120 Heidelberg, Germany
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Achim Fuß;
Achim Fuß
Surface Imaging Systems (SIS) GmbH
, Kaiserstraße 100, D-52134 Herzogenrath, Germany
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Frank Saurenbach;
Frank Saurenbach
Surface Imaging Systems (SIS) GmbH
, Kaiserstraße 100, D-52134 Herzogenrath, Germany
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Rüdiger Berger;
Rüdiger Berger
Max Planck Institute for Polymer Research
, Ackermannweg 10, D-55128 Mainz, Germany
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a)
Author to whom correspondence should be addressed. Electronic mail: [email protected]
Rev. Sci. Instrum. 78, 104105 (2007)
Article history
Received:
May 24 2007
Accepted:
August 25 2007
Citation
Jana Wehrmeister, Achim Fuß, Frank Saurenbach, Rüdiger Berger, Mark Helm; Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry. Rev. Sci. Instrum. 1 October 2007; 78 (10): 104105. https://doi.org/10.1063/1.2785028
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