Torsional harmonic cantilevers allow measurement of time-varying tip-sample forces in tapping-mode atomic force microscopy. Accuracy of these force measurements is important for quantitative nanomechanical measurements. Here we demonstrate a method to convert the torsional deflection signals into a calibrated force wave form with the use of nonlinear dynamical response of the tapping cantilever. Specifically the transitions between steady oscillation regimes are used to calibrate the torsional deflection signals.
REFERENCES
1.
Q.
Zhong
, D.
Innis
, K.
Kjoller
, and V. B.
Elings
, Surf. Sci.
280
, L688
(1993
).2.
D.
Klinov
and S.
Magonov
, Appl. Phys. Lett.
84
, 2697
(2004
).3.
R.
Garcia
and A. S.
Paulo
, Phys. Rev. B
60
, 4961
(1999
).4.
R.
Garcia
and A. S.
Paulo
, Phys. Rev. B
61
, R13381
(2000
).5.
S. I.
Lee
, S. W.
Howell
, A.
Raman
, and R.
Reifenberger
, Phys. Rev. B
66
, 115409
(2002
).6.
H.
Dankowicz
, Philos. Trans. R. Soc. London, Ser. A
364
, 3505
(2006
).7.
S. Q.
Hu
and A.
Raman
, Phys. Rev. Lett.
96
, 036107
(2006
).8.
A.
Kuhle
, A. H.
Sorensen
, and J.
Bohr
, J. Appl. Phys.
81
, 6562
(1997
).9.
J. P.
Cleveland
, B.
Anczykowski
, A. E.
Schmid
, and V. B.
Elings
, Appl. Phys. Lett.
72
, 2613
(1998
).10.
H.
Holscher
, Appl. Phys. Lett.
89
, 123109
(2006
).11.
R.
Garcia
, C. J.
Gomez
, N. F.
Martinez
, S.
Patil
, C.
Dietz
, and R.
Magerle
, Phys. Rev. Lett.
97
, 016103
(2006
).12.
M.
Lee
and W.
Jhe
, Phys. Rev. Lett.
97
, 036104
(2006
).13.
R.
Hillenbrand
, M.
Stark
, and R.
Guckenberger
, Appl. Phys. Lett.
76
, 3478
(2000
).14.
M.
Stark
, R. W.
Stark
, W. M.
Heckl
, and R.
Guckenberger
, Proc. Natl. Acad. Sci. U.S.A.
99
, 8473
(2002
).15.
R. W.
Stark
and W. M.
Heckl
, Rev. Sci. Instrum.
74
, 5111
(2003
).16.
O.
Sahin
, A.
Atalar
, C. F.
Quate
, and O.
Solgaard
, Phys. Rev. B
69
, 165416
(2004
).17.
S.
Crittenden
, A.
Raman
, and R.
Reifenberger
, Phys. Rev. B
72
, 235422
(2005
).18.
J.
Legleiter
, M.
Park
, B.
Cusick
, and T.
Kowalewski
, Proc. Natl. Acad. Sci. U.S.A.
103
, 4813
(2006
).19.
O.
Sahin
, G.
Yaralioglu
, R.
Grow
, S. F.
Zappe
, A.
Atalar
, C.
Quate
, and O.
Solgaard
, Sens. Actuators, A
114
, 183
(2004
).20.
R.
Proksch
, Appl. Phys. Lett.
89
, 113121
(2006
).21.
N. F.
Martinez
, S.
Patil
, J. R.
Lozano
, and R.
Garcia
, Appl. Phys. Lett.
89
, 153115
(2006
).22.
O.
Sahin
, S.
Magonov
, C.
Su
, C. F.
Quate
, and O.
Solgaard
, Nat. Nanotechnol.
2
, 507
(2007
).23.
A. S.
Paulo
and R.
Garcia
, Phys. Rev. B
64
, 193411
(2001
).24.
J. E.
Sader
, J. W. M.
Chon
, and P.
Mulvaney
, Rev. Sci. Instrum.
70
, 3967
(1999
).25.
J. L.
Hutter
and J.
Bechhoeffer
, Rev. Sci. Instrum.
64
, 1868
(1993
).26.
B.
Ohler
, Rev. Sci. Instrum.
78
, 063701
(2007
).27.
D. F.
Ogletree
, R. W.
Carpick
, and M.
Salmeron
, Rev. Sci. Instrum.
67
, 3298
(1996
).28.
R. J.
Cannara
, M.
Eglin
, and R. W.
Carpick
, Rev. Sci. Instrum.
77
, 053701
(2006
).29.
C. P.
Green
, H.
Lioe
, J. P.
Cleveland
, R.
Proksch
, P.
Mulvaney
, and J.
Sader
, Rev. Sci. Instrum.
75
, 1988
(2004
).30.
W.
Liu
, K.
Bonin
, and M.
Guthold
, Rev. Sci. Instrum.
78
, 063707
(2007
).31.
D. B.
Asay
and S. H.
Kim
, Rev. Sci. Instrum.
77
, 043903
(2006
).32.
Q.
Li
, K. S.
Kim
, and A.
Rydberg
, Rev. Sci. Instrum.
77
, 065105
(2006
).© 2007 American Institute of Physics.
2007
American Institute of Physics
You do not currently have access to this content.