With the objective of reducing the divergence, aerodynamic lenses were applied to collimate a beam of metal nanoparticles in a size range up to . Influences of the aerodynamic devices on the particle aggregation process and the beam properties have been evaluated by time-of-flight measurements on mass filtered clusters. Additional transmission electron microscopy and atomic force microscopy studies on deposited particles complement these investigations. Perspectives for the application of aerodynamic lenses in the collimation of ultrafine particles are discussed.
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