A one-finger adhesive type probe was constructed to assemble objects tens to hundreds of microns in size by utilizing adhesion forces in a humid environment. The interactive forces and the influencing factors during the assembly operation were analyzed with a theoretical contact model. Micro-objects with different surface conditions and materials were tested. Experimental results achieved in a humid environment of lifting polymer spheres are presented here. The success rate of picking up polymer spheres with sizes from 90 to from a gold coated substrate was about 0.7. Using this method, microgears with a size of and their shafts fabricated by two-photon stereo lithography technology were assembled successfully. Our experimental results demonstrate that an adhesive type probe is competent for small batch microdevice assembly tasks in humid environments.
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August 2005
Research Article|
July 22 2005
Microdevice assembling by adhesive type probe in humid environment
Jianhua Wu;
Jianhua Wu
Department of Precision Machinery and Precision Instrumentation,
University of Science and Technology of China
, Hefei, Anhui 230027, People’s Republic of China
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Jian Lu;
Jian Lu
Department of Precision Machinery and Precision Instrumentation,
University of Science and Technology of China
, Hefei, Anhui 230027, People’s Republic of China
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Jiaru Chu;
Jiaru Chu
a)
Department of Precision Machinery and Precision Instrumentation,
University of Science and Technology of China
, Hefei, Anhui 230027, People’s Republic of China
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Rui Guo;
Rui Guo
Department of Precision Machinery and Precision Instrumentation,
University of Science and Technology of China
, Hefei, Anhui 230027, People’s Republic of China
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Shizhou Xiao;
Shizhou Xiao
Department of Precision Machinery and Precision Instrumentation,
University of Science and Technology of China
, Hefei, Anhui 230027, People’s Republic of China
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Wenhao Huang
Wenhao Huang
Department of Precision Machinery and Precision Instrumentation,
University of Science and Technology of China
, Hefei, Anhui 230027, People’s Republic of China
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a)
Author to whom correspondence should be addressed; electronic mail: [email protected]
Rev. Sci. Instrum. 76, 085104 (2005)
Article history
Received:
January 25 2005
Accepted:
June 14 2005
Citation
Jianhua Wu, Jian Lu, Jiaru Chu, Rui Guo, Shizhou Xiao, Wenhao Huang; Microdevice assembling by adhesive type probe in humid environment. Rev. Sci. Instrum. 1 August 2005; 76 (8): 085104. https://doi.org/10.1063/1.1994983
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