Combined high-pressure cell–ultrahigh vacuum system for fast testing of model metal alloy catalysts using scanning mass spectrometry

An apparatus for fabrication, surface analysis in ultrahigh vacuum, and testing of the catalytic activity of model metal alloy catalysts is described. Arrays of model catalysts are produced by electron-beam deposition of up to four metals simultaneously onto a substrate. The surface analysis techniques available are scanning electron microscopy, x-ray photoemission spectroscopy, ion scattering spectroscopy, Auger electron spectroscopy, sputter profiling, and temperature programmed desorption. The catalytic activity of the model catalysts is tested individually by scanning a combined gas delivery and gas sampling device over the sample surface. The gas sampled is analyzed with mass spectrometry. Experiments can be made at pressures up to 1 bar and temperatures up to 500 °C. It is shown that the lateral resolution is better than 0.2 mm and that up to 20 circular spots, 1 mm in diameter, can be studied on a substrate 10 mm in diameter. A high pressure cell with an all-metal sealed ultrahigh vacuum lock is also described as part of the work.