The use of resistive charge division based solid-state detectors for position sensing of electrons has been studied. The operational conditions having importance for device performance are considered for one- and two-dimensional detectors manufactured by SiTek®. The parameter of main interest has been position resolution. Good linearity with a spatial resolution of 0.2 mm is obtained under optimum conditions. The advantages and limitations of the present approach and alternative techniques that could be considered for individual electron detection are discussed. A possible application of the detector is foreseen in its use for lattice location studies of impurity atoms by emission channeling.

1.
SiTek Electro Optics (www.sitek.se), Ögärdesvägen 13A, S-433 30 Partille, Sweden.
2.
E.
Lægesgaard
,
Nucl. Instrum. Methods
162
,
93
(
1979
).
3.
M.
Lindroos
and
Ö.
Skeppstedt
,
Nucl. Instrum. Methods Phys. Res. A
306
,
225
(
1991
).
4.
D. P. L.
Simons
,
P. H. A.
Mutsaers
,
L. J.
van Ijzendoorn
, and
M. J. A.
de Voigt
,
Nucl. Instrum. Methods Phys. Res. B
139
,
273
(
1998
).
5.
U.
Wahl
,
J. G.
Correia
,
S.
Cardoso
,
J. G.
Marques
,
A.
Vantomme
, and
G.
Langouche
,
Nucl. Instrum. Methods Phys. Res. B
136
,
744
(
1998
).
6.
K.
Yamamoto
,
S.
Yamaguchi
, and
Y.
Terada
,
IEEE Trans. Nucl. Sci.
32
,
438
(
1985
).
7.
E.
Elad
and
R.
Sareen
,
IEEE Trans. Nucl. Sci.
21
,
75
(
1974
).
8.
M. J. Berger, National Institute Of Standards and Technology Report No. NISTIR 4999 (1992).
9.
J. F. Ziegler, SRIM-2000 computer code, IBM-Research, Yorktown, NY 10598 (2001).
10.
F.
Busch
,
W.
Pfeffer
,
B.
Kohlmeyer
,
D.
Schüll
, and
F.
Pühlhoffer
,
Nucl. Instrum. Methods
171
,
71
(
1980
).
11.
G. W.
Fraser
and
E.
Mathieson
,
Nucl. Instrum. Methods
179
,
591
(
1981
).
12.
G. W.
Fraser
and
E.
Mathieson
,
Nucl. Instrum. Methods
184
,
537
(
1981
).
13.
G. W.
Fraser
,
E.
Mathieson
,
M.
Lewis
, and
M.
Barstow
,
Nucl. Instrum. Methods
190
,
53
(
1981
).
14.
V.
Perez-Mendez
and
S. I.
Parker
,
IEEE Trans. Nucl. Sci.
21
,
45
(
1974
).
15.
Y.
Uozumi
,
H.
Ohgaki
,
R.
Kubo
,
T.
Sajima
, and
T.
Motomura
,
IEEE Trans. Nucl. Sci.
36
,
218
(
1989
).
This content is only available via PDF.
You do not currently have access to this content.