We investigate some high aspect ratio etched silicon to determine its suitability as a lobster-eye optic. The major defects present leading to performance degradation are identified and tolerance goals are set for prospective candidates.

1.
M. F.
Land
,
Sci. Am.
239
,
88
(
1978
).
2.
J. R. P
Angel
,
Astrophys. J.
233
,
364
(
1979
).
3.
H. N.
Chapman
and
A. V.
Rode
,
Appl. Opt.
33
,
2419
(
1994
).
4.
M. A.
Kumakhov
and
F. F.
Komanov
,
Phys. Rep.
191
,
290
(
1990
).
5.
G. W.
Fraser
,
A. N.
Brunton
,
J. E.
Lees
,
J. F.
Pearson
, and
W. B.
Feller
,
Nucl. Instrum. Methods Phys. Res. A
324
,
404
(
1993
).
6.
A. G.
Peele
,
K. A.
Nugent
,
A. V.
Rode
,
K.
Gabel
,
M. C.
Richardson
,
R.
Strack
, and
W.
Siegmund
,
Appl. Opt.
35
,
4420
(
1996
).
7.
W. C.
Priedhorsky
,
A. G.
Peele
, and
K. A.
Nugent
,
Mon. Not. R. Astron. Soc.
279
,
733
(
1996
).
8.
A. N.
Brunton
,
G. W.
Fraser
,
J. E.
Lees
, and
I. C. U.
Turcu
,
Appl. Opt.
36
,
5461
(
1997
).
9.
N. M.
Ceglio
,
J. X-Ray Sci. Tech.
1
,
7
(
1989
).
10.
A. Michette, Optical Systems for Soft X-Rays (Plenum, New York, 1986).
11.
A. W.
Chen
,
P. E.
Kaaret
, and
T. W.
Kenny
,
Proc. SPIE
2279
,
298
(
1994
).
12.
A. W.
Chen
,
P. E.
Kaaret
, and
T. W.
Kenny
,
Proc. SPIE
2011
,
227
(
1994
).
13.
H. N.
Chapman
,
K. A.
Nugent
, and
S. W.
Wilkins
,
Rev. Sci. Instrum.
62
,
1542
(
1991
).
14.
A. G.
Peele
,
B. E.
Allman
,
V.
Cucevic
,
A.
Cimmino
,
K. A.
Nugent
,
S.
Wilkins
, and
H. N.
Chapman
,
Proc. SPIE
2015
,
118
(
1994
).
15.
A. N.
Brunton
,
G. W.
Fraser
,
J. E.
Lees
,
W. B.
Feller
, and
P. L.
White
,
Proc. SPIE
2519
,
40
(
1995
).
16.
83 Prokop Rd., Oxford, CT 06478.
17.
V.
Lehmann
,
J. Electrochem. Soc.
140
,
2836
(
1991
).
18.
S.
Ottow
,
V.
Lehman
, and
H.
Föll
,
Appl. Phys. A: Solids Surf.
63
,
153
(
1996
).
19.
V.
Lehmann
and
H.
Föll
,
J. Electrochem. Soc.
137
,
653
(
1990
).
20.
A.
Uhlir
,
Bell Syst. Tech. J.
35
,
333
(
1956
).
21.
D. R.
Turner
,
J. Electrochem. Soc.
105
,
402
(
1958
).
22.
V.
Lehmann
and
U.
Grüning
,
Thin Solid Films
297
,
13
(
1997
).
23.
L. G.
Parratt
,
Phys. Rev.
95
,
359
(
1954
).
24.
P.
Debye
,
Ann. Phys. (Leipzig)
43
,
49
(
1914
).
25.
A. G. Peele, Ph.D. thesis, University of Melbourne, 1996.
This content is only available via PDF.
You do not currently have access to this content.