We describe a torque magnetometer for use at low temperatures based on a high-Q silicon torsional oscillator. The oscillator is fabricated using standard lithographic techniques from a single-crystal silicon wafer. The sample stage of the oscillator has an area of 0.57 cm2 and is suitable for deposition of thin magnetic film samples. Oscillator motion is detected through a capacitance measurement. The small torsion constant of the oscillator combined with a Qvalue >106 allow detection of magnetic moments as small as 10−13A m2. Magnetometer sensitivity is measured using small superconducting open cylinders machined from aluminum.

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