A simple substrate heater for oxide film deposition is presented. Its main features are (a) good thermal contact between temperature sensor, heater, and substrate and (b) compatibility with oxidizing atmosphere at high temperatures. The system shows a good response for the deposition conditions necessary in high‐Tc cuprate materials.

1.
For an extensive review of high-Tc thin film properties and deposition methods, see, for example, T. R. Lemberger, in Physical Properties of High Temperature Superconductors III, edited by D. M. Ginsberg (World Scientific, Singapore, 1992), p. 471.
2.
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R. C.
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4.
Thermocoax wire, Phillips Electronics Instruments Co.
5.
OMEGACLAD thermocouple, Omega Engineering, Inc.
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