For damping residual, unsteady flows in semiconductor melts a space‐compatible multizone furnace including a magnetic damping array consisting of two radially magnetized permanent magnet rings has been developed. The performance of the whole system has been verified by measuring the temperature fluctuations caused by the time‐dependent thermal convection in a Ga melt at 850 °C. By applying a static magnetic induction of 186 mT the fluctuations could be reduced from about 1.5 °C to less than 0.02 °C. For these high precision measurements optical fiber sensors have been used to measure the temperature in the Ga melt and to control the multizone furnace as well. A temperature constancy of ΔT≤0.03 °C in the melt could be established over a period of 16 h.

Topics
Electromagnetic induction, Electrodynamics, Thermal instruments, Thermodynamic states and processes, Magnetic materials, Semiconductor crystals, Fiber optic devices, Flow instabilities
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