This types of vacuum arc ion source provides the generation of ions of various gases and metals. A specific feature of these ion sources is the use of two cold‐cathode arc discharges to produce plasma for the extraction of ion beams. Metal ions are generated by means of a vacuum arc in the metal vapor produced by cathode spots. Gas ions are generated by a constricted low‐pressure arc discharge. In this paper we discuss the problem as follows: the production of broad beams by extracting ions from the anode cavity in the transverse direction and the initiation of a vacuum arc cathode spot by an auxiliary discharge in a strong magnetic field.

Topics
Electric discharges, Magnetic fields, Cold cathodes, Vacuum arcs, Ion source, Ions and properties
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© 1996 American Institute of Physics.
1996
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