We present a nonoptical shear‐force feedback method to regulate tip–sample distance for near‐field scanning optical microscopy. In the shear force setup, the dither piezo and the attached fiber tip form an electromechanical system, whose power dissipation on resonance is sensitive to the change in damping force as the tip approaches and interacts with the sample. At the frequencies of interest (∼10–100 kHz), the change in power dissipation is conveniently manifested as a change in the electrical impedance of the dither piezo. We demonstrate that tip–sample distance feedback control can be achieved by measuring this change in dither piezo impedance. The sensitivity is currently ∼0.5 Å. This new technique is compared to other methods currently used for distance control in near‐field scanning optical microscopy.

1.
E.
Betzig
,
J. K.
Trautman
,
T. D.
Harris
,
J. S.
Weiner
, and
R. L.
KosteJak
,
Science
251
,
1468
(
1991
).
2.
The mechanism of this interaction is currently unknown. Some of the proposed mechanisms are viscous drag, chemical force, and patch charges. For the purpose of this publication, the details of the interaction are not important.
3.
E.
Betzig
,
P. L.
Finn
, and
J. S.
Weiner
,
Appl. Phys. Lett.
60
,
2484
(
1992
).
4.
R.
Toledo-Crow
,
P. C.
Yang
,
Y.
Chen
, and
M.
Vaez-Iravani
,
Appl. Phys. Lett.
60
,
2957
(
1992
).
5.
M.
Garcia-Parajo
,
E.
Cambril
, and
Y.
Chen
,
Appl. Phys. Lett.
65
,
1498
(
1994
).
6.
K. Karrai and R. D. Grober (preprint).
7.
J. W. P.
Hsu
,
E. A.
Fitzgerald
,
Y. H.
Xie
, and
P. J.
Silverman
,
Appl. Phys. Lett.
65
,
344
(
1994
).
8.
S. K.
Buratto
,
J. W. P.
Hsu
,
J. K.
Trautman
,
E.
Betzig
,
R. B.
Bylsma
,
C. C.
Bahr
, and
M. J.
Cardillo
,
J. Appl. Phys.
76
,
7720
(
1994
).
9.
We use two 6 kΩ metal resistors (1%) for two legs of the bridge. The third leg of the bridge is a 160 pF capacitor in parallel with a 38 pF variable capacitor.
10.
J. W. P.
Hsu
,
E. A.
Fitzgerald
,
Y. H.
Xie
,
P. J.
Silverman
, and
M. J.
Cardillo
,
Appl. Phys. Lett.
61
,
1293
(
1992
).
11.
The piezoelectric charge constant (d31) of the dither piezo materials is −2.62×10−10m/V.
12.
The ultimate limit in detecting the dither piezo impedance change is due to the thermal motion of the tip on resonance, Δx/(Hz)l/2 = (4kBTQ/kω0(1/2,where kB is the Boltzmann constant, and w0 is the resonant frequency. We estimate it to be 10−4‐10−3 Å/(Hz)1/2. Experimentally, this contributes negligibly to the measurement noise, with an upper limit of 0.1 nV/(Hz)1/2.
13.
F. F.
Froehlich
and
T. D.
Milster
,
Appl. Phys. Lett.
65
,
2254
(
1994
).
This content is only available via PDF.
You do not currently have access to this content.