A new instrument for spot profile analysis of reflection high‐energy electron diffraction (SPA‐RHEED) has been developed. The system works either in the conventional mode with a fluorescent screen or in the new high‐resolution mode with a channeltron for the registration of the diffraction pattern. The unique properties (a transfer width of 0.2 μm, perfect linearity, high dynamic range, insensitivity to ambient light, low beam current, and energy filtering better than 4 eV) are described in detail. The results show that SPA‐RHEED offers new additional applications such as quantitative spot profile analysis for the determination of the surface morphology and lattice constant measurements with an accuracy better than 0.001.

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