The position and angle measurements discussed in the paper are carried out by application of a displacement‐angle interferometer which employs a single laser and is capable of resolutions better than 1 pm and 1 nrad. Angle and displacement values are simultaneously obtained by measuring the phase shifts between four points of the interference pattern with the use of a position‐sensitive detector. Though the instrument resembles an optical lever, it is largely insensitive to beam movements, since angle values are obtained by phase rather than position measurements. The interferometer design and performance are discussed, emphasis being given to applications in x‐ray/optical interferometry.
REFERENCES
1.
D. Windisch and G. Ebeling, PTB Report APh-32 (Braunschweig, 1990).
2.
G. G.
Luther
, R. D.
Deslattes
, and W. R.
Towler
, Rev. Sci. Instrum.
55
, 747
(1984
).3.
G.
Basile
, A.
Bergamin
, G.
Cavagnero
, G.
Mana
, and G.
Zosi
, IEEE Trans. Instrum. Meas.
38
, 210
(1989
).4.
G.
Basile
, A.
Bergamin
, G.
Cavagnero
, and G.
Mana
, Metrologia
28
, 455
(1992
).5.
M.
Alemanni
, G.
Mana
, G.
Pedrotti
, P. P.
Strona
, and G.
Zosi
, Metrologia
22
, 55
(1986
).6.
7.
R. D. Deslattes, Metrology and Fundamental Constants, course LXVIII, edited by A. F. Milone and P. Giaconao (North-Holland, New York, 1980), p. 38.
8.
9.
M.
Tanaka
, K.
Nakayama
, and K.
Kuroda
, IEEE Trans. Instrum. Meas.
38
, 206
(1989
).10.
A.
Bergamin
, G.
Cavagnero
, and G.
Mana
, Rev. Sci. Instrum.
64
, 168
(1993
).11.
U. Bonse and W. Graeff, in X-Ray Optics, Topics in Applied Physics, edited by H.-J. Quessier (Springer, Berlin, 1977), Vol. 33, pp. 93–143.
12.
A.
Bergamin
, G.
Cavagnero
, and G.
Mana
, Meas. Sci. Technol.
2
, 725
(1991
).13.
14.
15.
A.
Bergamin
, G.
Cavagnero
, and G.
Mana
, J. Mod. Opt.
39
, 2053
(1992
).16.
17.
G. Mana, A. Bergamin, R. C. Michelini, G. B. Rossi, and G. Zosi, Proc. IMEKO XI Conf., Houston TX, 1988, 171 pp.
This content is only available via PDF.
© 1993 American Institute of Physics.
1993
American Institute of Physics
You do not currently have access to this content.
