The 100‐kV gas and metal ion source for high current ion implantation Available to Purchase

The TITAN ion source is a new kind of source which can produce high current beams of both metal and gas ions simultaneously or separately. Ion beams of the elements Mg, Al, Ti, Ca, Cr, Fe, Co, Ni, Zn, Sn, Ta, Re, Y, C, He, N, Ar, and Xe have been generated. To obtain metal ions a vacuum arc is used in metal vapors created in ‘‘cathode spots.’’ To obtain gas ions a contragated arc discharge in gas current is used. The source extraction voltage is controlled within 10–100 kV. The ion current of both gas and metal was ≂1 A. The source operates in a frequency‐pulse regime at a pulse‐repetition frequency as high as 50 pps. At its normal operation the source provides a dose of 10¹⁶ ions/cm² per minute on a 250‐cm² area surface. The source is constructed according to the program on development of new technologies and is intended for high current surface modification and production of exotic surface alloys. At present, TITAN ion sources are utilized to modify physical‐mechanical parameters of different surfaces. Here we outline the ion source and its performance.