New possibilities of ultrathin film thickness and density determination are demonstrated by means of x‐ray method in the form of x‐ray standing wave technique (XSW) and total external fluorescence study (NTEF). Several samples with ultrathin Fe films protected by carbon layers and with bare Fe film on the top have been analyzed. Rh/C LSM was used as an XSW generator to determine the film’s thickness (15–40 Å). Densities were evaluated by NTEF study and came out to be about 85% from that of the bulk material for covered and 45% for bare Fe films. The detailed analysis of E‐field intensity distribution over the diffracting medium is presented.

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