The Aurora is a compact SR‐light system optimized for x‐ray lithography. The system includes a superconducting electron storage ring, a 150‐MeV race track microtron as an injector, and light beamlines. The SR‐ring features a single magnet body, in which the 650‐MeV electron beam orbits a true circular trajectory of 1 m diameter. The computer control system developed for Aurora has a three‐level hierarchical architecture. The top level is the Central Intelligence System, and the second an Autonomic Control System (ACS). The bottom is an assembly of distributed local controllers linked to the ACS level through optical fibers. This system provides fully automatic and remote operation, and a powerful machine study capability through the associated man–machine console and the interpretive operation language.

Topics
Superconductivity, Auroral phenomena, Computer control system, X-ray lithography, Optical fibers, Microtron, Storage rings, Plasmas
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© 1989 American Institute of Physics.
1989
American Institute of Physics
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