The basic parameters of the refocus geometry cesium sputter ion source for the production of negative ions from a low‐sputtering material (carbon) and a high‐sputtering material (copper) have been measured. The question of the influence of sample temperature on the negative‐ion generation process has been addressed. Negative‐ion yields from carbon samples are found to be weakly dependent on temperature over a range from 26° to 400 °C, while those from copper samples are found to be essentially independent of temperature over a range of 26° to 200 °C. The results of these investigations indicate that (1) sample temperature does not strongly influence negative formation in these sources, and (2) the maximum negative‐ion yields for a given sample are dependent on both cesium‐ion energy and positive‐ion current. In addition to these data, the negative‐ion extraction optics of the source are briefly discussed and cursory estimates of the probabilities for negative‐ion formation presented.
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July 1988
Research Article|
July 01 1988
Aspects of negative‐ion generation and extraction from a refocus geometry cesium sputter negative‐ion source. II Available to Purchase
Rev. Sci. Instrum. 59, 1045–1052 (1988)
Article history
Received:
October 22 1987
Accepted:
March 08 1988
Citation
G. D. Alton; Aspects of negative‐ion generation and extraction from a refocus geometry cesium sputter negative‐ion source. II. Rev. Sci. Instrum. 1 July 1988; 59 (7): 1045–1052. https://doi.org/10.1063/1.1139777
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