A high‐speed mechanical scanning stage for microscopic applications has been designed and constructed. It is especially suitable for high‐resolution confocal UV microscopy. It is a feedback design using electromagnetic actuators and piezoelectric sensors with motor‐driven screws for coarse adjustment. Scanning of areas up to 1 mm square at up to 300 lines per second is possible with positional resolution of better than 0.01 μm. An exceptionally stable optical system is also described.
REFERENCES
1.
G. J.
Brakenhoff
, P.
Blom
, and P.
Barends
, J. Microsc.
117
, 219
(1979
).2.
3.
G.
Schmahl
, D.
Rudolph
, B.
Niermann
, and O.
Christ
, Ann. N.Y. Acad. Sci.
342
, 368
(1980
).4.
R. C.
McDermott
, A. S. J.
Farrow
, D. A.
Finlayson
, and J.
Cameron
, J. Phys. E
12
, 98
(1979
).5.
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© 1983 American Institute of Physics.
1983
American Institute of Physics
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