A rotary‐motion feedthrough suitable for use in UHV at frequencies between 1200–15,000 rpm is described. The outgassing rate in operation is less than 2×10−8 torr l/s.
Topics
Gas liquid interfaces
REFERENCES
1.
2.
The rotor and stator were obtained from KaVo Elektrotechnisches Werk GmbH D‐7970 Leutkirch, West Germany. Type EV 48‐15.
3.
The bearings used were Barden Bartemp SR188SSTB without lubrication.
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© 1981 American Institute of Physics.
1981
American Institute of Physics
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