Modern integrated circuits have made possible the construction of a simple and inexpensive quartz crystal mass/thickness monitor having high sensitivity and good resolution. We have constructed such a thickness monitor having a resolution of 0.1 nm for evaporated lead films. This same device can also be readily made to function as a microbalance capable of resolving mass changes as small as 1 ng.
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© 1978 American Institute of Physics.
1978
American Institute of Physics
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