Vector‐rf‐B‐field measurements in the near‐field of a helicon plasma source taken throughout the volume of the source are reported. Three distinct modes of operation of the helicon plasma source, capacitive, inductive, and helicon‐wave, are identified by the structure of the plasma‐wave‐fields. Results are reported for a double‐half‐turn antenna, which is believed to be the first reporting for such an antenna structure in application to helicon‐wave plasma sources. Comparison is made to a double‐saddle‐coil antenna which also demonstrates the distinct inductive and helicon‐wave modes.
REFERENCES
1.
R. W. Boswell, Ph.D. thesis, Flinders University of South Australia, 1970.
2.
3.
F. F.
Chen
and G.
Chevalier
, J. Vac. Sci. Technol. A
10
, 1389
(1992
).4.
A.
Komori
, T.
Shoji
, K.
Miyamoto
, J.
Kawai
, and Y.
Kawai
, Phys. Fluids B
3
, 893
(1991
).5.
6.
P. K.
Loewenhardt
, B. D.
Blackwell
, R. W.
Boswell
, G. D.
Conway
, and S. M.
Hamberger
, Phys. Rev. Lett.
67
, 2792
(1991
).7.
8.
A. R.
Ellingboe
, R. W.
Boswell
, J. P.
Booth
, and N.
Sadeghi
, Phys. Plasmas
2
, 1807
(1995
).9.
10.
R. W.
Boswell
, A. J.
Perry
, and M.
Emami
, J. Vac. Sci. Technol. A
7
, 3345
(1989
).11.
A. J.
Perry
, D.
Vender
, and R. W.
Boswell
, J. Vac. Sci. Technol. B
9
, 310
(1991
).12.
R. W.
Boswell
and R. K.
Porteous
, Appl. Phys. Lett.
50
, 1130
(1987
).13.
A. W. Molvik, T. D. Rognlien, J. A. Byers, R. H. Cohen, A. R. Ellingboe, E. B. Hooper, H. S. McLean, B. W. Stallard, and P. A. Vitello, “Experiments and modeling of a helicon plasma source,” to appear in J. Vac. Sci. Technol.
14.
A. W.
Degeling
, C. O.
Jung
, R. W.
Boswell
, and A. R.
Ellingboe
, Phys. Plasmas
3
, 2788
(1996
).15.
T.
Watari
, T.
Hatori
, R.
Kumazawa
, S.
Hidekuma
, T.
Aoki
, T.
Kawamoto
, M.
Inutake
, S.
Hiroi
, A.
Nishizawa
, and K.
Adati
, Phys. Fluids
21
, 2076
(1978
).16.
F. F. Chen, in High Density Plasma Sources, edited by O. A. Popov (Noyes, Park Ridge, NJ, 1994).
17.
18.
N.
Jiwari
, T.
Fukasawa
, H.
Kawakami
, H.
Shindo
, and Y.
Horiike
, J. Vac. Sci. Technol. A
12
, 4454
(1994
).19.
J. E.
Stevens
, M. J.
Sowa
, and J. L.
Cecchi
, J. Vac. Sci. Technol. A
13
, 2476
(1995
).20.
R. Cross (private communication).
21.
22.
R. T. S.
Chen
, R. A.
Breus
, S.
Gross
, N.
Hershkowitz
, M.-K. J.
Hsieh
, and J.
Jacobs
, Plasma Sources Sci. Technol.
4
, 337
(1995
).23.
H. U. Eckert, Proceedings of the Second Annual International Conference on Plasma Chemistry and Technology, edited by H. Boenig (Technomic, Lancaster, PA, 1986), and references within.
24.
J. A. Bittencourt, Fundamentals of Plasma Physics (Pergamon, New York, 1986). Equation 5.4: Frequency dependent Hall conductivity. Helicon waves are dominated by Hall currents, as evident from the definition for Ohms law [Eq. (1)] used in this paper.
25.
R. W.
Boswell
and P. J.
Kellog
, J. Geophys. Res. Lett.
10
, 565
(1983
).26.
G. G.
Borg
and R. C.
Cross
, Plasma Phys. Controlled Fusion
29
, 681
(1987
).27.
See National Information Service Document No. DE85004960 (B. McVey, Plasma Fusion Center, Massachusetts Institute of Technology, Report No. PFC/RR-84-12). Copies may be ordered from the National Technical Information Service, Springfield, VA 22161.
28.
29.
30.
M.
Light
, I. D.
Sudit
, F. F.
Chen
, and D.
Arnush
, Phys. Plasmas
2
, 4094
(1995
).
This content is only available via PDF.
© 1996 American Institute of Physics.
1996
American Institute of Physics
You do not currently have access to this content.