An experimental investigation of electrode voltage/discharge current, plasma density, including negative ions and ion flux, and ion energy distributions (IEDs) is performed in a low-pressure oxygen discharge excited by a multi-tile electrode, very high frequency (162 MHz) capacitively coupled plasma system. The results show a mode transition vs RF power. An inflection point is observed in the measured electrode voltage and current near to the mode transition. The negative ion density inferred from the measured electron density and ion flux using resonance hairpin probe and planar probe, respectively, shows an initial increase and then decrease after mode transition. The IED shows a symmetric narrow distribution and the mean energy first increases up to the transition point and then decreases with further increase in RF power. A change in the current coupling mechanism and variation in the discharge impedance due to the presence of negative ions are responsible for the observed mode transition.
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Mode transition in an oxygen low-pressure, very high frequency (162 MHz), multi-tile electrode capacitively coupled plasma
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November 2020
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November 23 2020
Mode transition in an oxygen low-pressure, very high frequency (162 MHz), multi-tile electrode capacitively coupled plasma
C. Harvey
;
C. Harvey
1
School of Physical Sciences and NCPST, Dublin City University
, Dublin 9, Ireland
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N. Sirse
;
N. Sirse
a)
2
Institute of Science and Laboratory Education, IPS Academy
, Indore 452012, India
a)Author to whom correspondence should be addressed: nishantsirse@ipsacademy.org
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C. Gaman
;
C. Gaman
1
School of Physical Sciences and NCPST, Dublin City University
, Dublin 9, Ireland
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A. R. Ellingboe
A. R. Ellingboe
1
School of Physical Sciences and NCPST, Dublin City University
, Dublin 9, Ireland
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a)Author to whom correspondence should be addressed: nishantsirse@ipsacademy.org
Phys. Plasmas 27, 110701 (2020)
Article history
Received:
July 28 2020
Accepted:
October 26 2020
Citation
C. Harvey, N. Sirse, C. Gaman, A. R. Ellingboe; Mode transition in an oxygen low-pressure, very high frequency (162 MHz), multi-tile electrode capacitively coupled plasma. Phys. Plasmas 1 November 2020; 27 (11): 110701. https://doi.org/10.1063/5.0022844
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