The drift velocities of ions in a constant homogeneous electric field are calculated using Monte Carlo simulations for noble-gas and some metal vapors. The ion mobility is analyzed as a function of the field strength and gas temperature. A general approximate formula for the dependence of the drift velocity on the reduced field and gas temperature is derived. The results of calculations of kinetic characteristics of ions crossing the surface of the target are presented. The authors focus on the angular and energy distributions of ions and differences between the distributions of the average volume and the average flow on the surface.
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