We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.
Simple experiment on the sputtering rate of solids in gas discharges
Peter Hartmann, Jorge C. Reyes, Ihor Korolov, Lorin S. Matthews, Truell W. Hyde; Simple experiment on the sputtering rate of solids in gas discharges. Phys. Plasmas 1 June 2017; 24 (6): 060701. https://doi.org/10.1063/1.4985080
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