We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.
References
1.
Plasma-Surface Interactions and Processing of Materials
, NATO ASI Series E: Applied Sciences Vol. 176
, edited by O.
Auciello
, A.
Gras-Martí
, J. A.
Valles-Abarca
, and D. L.
Flamm
(Kluwer Academic Publisher
, 1990
).2.
H. S. W.
Massey
, E. H. S.
Burhop
, and H. B.
Gilbody
, Electronic and Ionic Impact Phenomena Vol. III: Slow Collisions of Heavy Particles
(Clarendon Press
, Oxford
, 1971
).3.
W.
Jacob
, Thin Solid Films
326
, 1
–42
(1998
).4.
M.
Bonitz
, “ Towards a unified treatment of the plasma-solid system. The Kiel research project ‘The Plasma Interface’
,” in Conference Abstract, Quo Vadis - Complex Plasmas Summers School and Conference
, Hamburg, Germany, 1–4 August 2016
.5.
R.
Behrisch
, Sputtering by Particle Bombardment I–III
(Springer Verlag
, Berlin
, 1981
/1991).6.
P.
Hartmann
, A. Zs.
Kovács
, J. C.
Reyes
, L. S.
Matthews
, and T. W.
Hyde
, Plasma Sources Sci. Technol.
23
, 045008
(2014
).7.
J.
Carstensen
, F.
Greiner
, and A.
Piel
, Phys. Plasmas
17
, 083703
(2010
).8.
M.
Bonitz
, C.
Henning
, and D.
Block
, Rep. Prog. Phys.
73
, 066501
(2010
).9.
G.
Gebauer
and J.
Winter
, New J. Phys.
5
, 38
(2003
).10.
R. L.
Heinisch
, F. X.
Bronold
, and H.
Fehske
, Phys. Rev. Lett.
109
, 243903
(2012
).11.
W. W.
Stoffels
, E.
Stoffels
, G. H. P. M.
Swinkels
, M.
Boufnichel
, and G. M. W.
Kroesen
, Phys. Rev. E
59
, 2302
(1999
).12.
C.
Killer
, M.
Mulsow
, and A.
Melzer
, Plasma Sources Sci. Technol.
24
, 025029
(2015
).13.
C.
Killer
, F.
Greiner
, S.
Groth
, B.
Tadsen
, and A.
Melzer
, Plasma Sources Sci. Technol.
25
, 055004
(2016
).14.
J.
Carstensen
, H.
Jung
, F.
Greiner
, and A.
Piel
, Phys. Plasmas
18
, 033701
(2011
).15.
H.
Jung
, F.
Greiner
, O. H.
Asnaz
, J.
Carstensen
, and A.
Piel
, J. Plasma Phys.
82
, 615820301
(2016
).16.
J.
Pavlu
, A.
Velyhan
, I.
Richterova
, Z.
Nemecek
, J.
Safrankova
, I.
Cermak
, and P.
Zilavy
, IEEE Trans. Plasma Sci.
32
, 704
(2004
).17.
X. Z.
Tang
and G. L.
Delzanno
, Phys. Plasmas
21
, 123708
(2014
).18.
S.
Hamaguchi
and R. T.
Farouki
, Phys. Rev. E
49
, 4430
(1994
).19.
N. Kh.
Bastykova
, A. Zs.
Kovács
, I.
Korolov
, S. K.
Kodanova
, T. S.
Ramazanov
, P.
Hartmann
, and Z.
Donkó
, Contrib. Plasma Phys.
55
, 671
–676
(2015
).20.
M. A.
Ermolenko
, E. S.
Dzlieva
, V. Yu.
Karasev
, S. I.
Pavlov
, V. A.
Polishchuk
, and A. P.
Gorbenko
, Tech. Phys. Lett.
41
, 1199
–1201
(2015
).21.
S. A.
Khrapak
and G. E.
Morfill
, Phys. Plasmas
13
, 104506
(2006
).22.
Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies
, edited by R.
Behrisch
and W.
Eckstein
(Springer
, 2007
).© 2017 Author(s).
2017
Author(s)
You do not currently have access to this content.
